JPH0519952Y2 - - Google Patents
Info
- Publication number
- JPH0519952Y2 JPH0519952Y2 JP16970187U JP16970187U JPH0519952Y2 JP H0519952 Y2 JPH0519952 Y2 JP H0519952Y2 JP 16970187 U JP16970187 U JP 16970187U JP 16970187 U JP16970187 U JP 16970187U JP H0519952 Y2 JPH0519952 Y2 JP H0519952Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- lower plate
- heat treatment
- wafer support
- column
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 42
- 238000010438 heat treatment Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 7
- 239000004065 semiconductor Substances 0.000 claims description 4
- 230000000694 effects Effects 0.000 description 5
- 238000007517 polishing process Methods 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 2
- 229910010271 silicon carbide Inorganic materials 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16970187U JPH0519952Y2 (en]) | 1987-11-06 | 1987-11-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16970187U JPH0519952Y2 (en]) | 1987-11-06 | 1987-11-06 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0173926U JPH0173926U (en]) | 1989-05-18 |
| JPH0519952Y2 true JPH0519952Y2 (en]) | 1993-05-25 |
Family
ID=31459994
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16970187U Expired - Lifetime JPH0519952Y2 (en]) | 1987-11-06 | 1987-11-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0519952Y2 (en]) |
-
1987
- 1987-11-06 JP JP16970187U patent/JPH0519952Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0173926U (en]) | 1989-05-18 |
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